

- ÖÐÎÄ
- English

2018Äê9Ôµף¬ÓÉÉòÑôÍؾ£¿Æ¼¼ÓÐÏÞ¹«Ë¾×ÔÖ÷ÑÐÖƵÄ12Ó¢´çÔ×Ó²ã³Á»ý£¨Atomic Layer Deposition£¬ALD£©É豸ͨ¹ýÁË¿Í»§µÄÑéÊÕ¡£
ALDÉ豸ÊǼ¯³Éµç·ÖƱ¸¹ý³ÌÖÐÒªº¦µÄ±¡Ä¤³Á»ýÉ豸£¬±»ÊÓΪÏȽø°ëµ¼Ì幤ÒÕ¼¼ÊõÉú³¤µÄÒªº¦»·½ÚÖ®Ò»¡£ÀûÀ´ÀÏÅƹú¼Ê¹ÙÍøapp¹«Ë¾»ùÓÚÒÑͨ¹ýÉú²úÑéÖ¤µÄ¸ß²úÄÜPECVDÉ豸ƽ̨£¬ÀÖ³ÉÑÐÖÆÁ˹úÄÚÊ×̨Á¿²úÐÍ12Ó¢´çALDÉ豸£¬²¢Ñ¸ËÙÍÆÏòÊг¡£¬¿ÉÓ¦ÓÃÓÚ28nmÒÔÉϼ«´ó¹æÄ£¼¯³Éµç·£¬OLED¼°ÏȽø·â×°£¨TSV£©ÁìÓò£¬Í¶ÈëÏȽøÉú²úÏߣ¬ÓÃÓÚ³Á»ýSiO2£¬SiNxµÈ¾øÔµ±¡Ä¤¡£¸ÃÉ豸ÒÑÀֳɽøÈëÊÔÉú²úÏß¿¼ºËÑéÖ¤£¬Àúʱ3¸ö¶àÔ£¬Í¨¹ýÁË¿Í»§µÄ¿¼ºËÑéÊÕ£¬É豸¸÷ÏîÐÔÄÜÖ¸±ê¾ùÂú×ãÒªÇó£¬ÇÒµ½´ï»òÁè¼ÝÁ˹ú¼ÊͬÀà²úÎïµÄÏȽøˮƽ£¬ÕâÊÇÎÒ¹úÔÚʵÏÖ°ëµ¼Ìå×°±¸¹ú²ú»¯½ø³ÌÖеÄÓÖÒ»ÖØ´óÍ»ÆÆ¡£